| COMUNA | Antofagasta | Mejillones | Sierra Gorda | Taltal | Calama | Ollagüe | San Pedro de Atacama | María Elena | Tocopilla |
|---|---|---|---|---|---|---|---|---|---|
| 1990 | 152186 | 0 | 0 | 0 | 79596 | 0 | 0 | 0 | 0 |
| 1992 | 165834 | 4290 | 488 | 6287 | 83407 | 0 | 1712 | 0 | 15170 |
| 1994 | 173970 | 4435 | 566 | 6558 | 82540 | 0 | 1974 | 6304 | 15855 |
| 1996 | 188668 | 0 | 0 | 6658 | 88331 | 0 | 1502 | 0 | 16180 |
| 1998 | 198164 | 5094 | 0 | 6943 | 83862 | 0 | 2640 | 0 | 16851 |
| 2000 | 212582 | 5463 | 728 | 6649 | 94776 | 0 | 1672 | 4891 | 14978 |
| 2003 | 223969 | 5761 | 810 | 6412 | 102602 | 0 | 2822 | 4709 | 16947 |
| 2006 | 244322 | 6546 | 1015 | 6458 | 101013 | 88 | 3466 | 3483 | 16170 |
| 2009 | 247515 | 7259 | 1031 | 6124 | 104054 | 86 | 4658 | 2942 | 15751 |
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